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Pt:SnO2 thin films for gas sensor characterized by atomic force microscopy and x-ray photoemission spectromicroscopy.

Authors :
Cricenti, A.
Generosi, R.
Scarselli, M. A.
Perfetti, P.
Siciliano, P.
Serra, A.
Tepore, A.
Almeida, J.
Coluzza, C.
Margaritondo, G.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 2, p1527-1530, 4p
Publication Year :
1996

Details

Language :
English
ISSN :
10711023
Volume :
14
Issue :
2
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74341523
Full Text :
https://doi.org/10.1116/1.589132