Multilayer technique for fabricating Nb junction circuits exhibiting charging effects.

MLA

Pavolotsky, A. B., et al. “Multilayer Technique for Fabricating Nb Junction Circuits Exhibiting Charging Effects.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 17, no. 1, Jan. 1999, pp. 230–32. EBSCOhost, https://doi.org/10.1116/1.590504.

APA

Pavolotsky, A. B., Weimann, T., Scherer, H., Krupenin, V. A., Niemeyer, J., & Zorin, A. B. (1999). Multilayer technique for fabricating Nb junction circuits exhibiting charging effects. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 17(1), 230–232. https://doi.org/10.1116/1.590504

Chicago

Pavolotsky, A. B., Th. Weimann, H. Scherer, V. A. Krupenin, J. Niemeyer, and A. B. Zorin. 1999. “Multilayer Technique for Fabricating Nb Junction Circuits Exhibiting Charging Effects.” Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 17 (1): 230–32. doi:10.1116/1.590504.