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Effect of the first antimony layer on AuZn ohmic contacts to p-type InP.

Authors :
Yamaguchi, Akira
Asamizu, Hirokuni
Okada, Takeshi
Iguchi, Yasuhiro
Saitoh, Tadashi
Koide, Yasuo
Murakami, Masanori
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2000, Vol. 18 Issue 4, p1957-1961, 5p
Publication Year :
2000

Details

Language :
English
ISSN :
10711023
Volume :
18
Issue :
4
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74344524
Full Text :
https://doi.org/10.1116/1.1305290