Metal-oxide-semiconductor field-effect transistor-structured Si field emitter array with a built-in ring gate lens.

Details

Language :

English

ISSN :

10711023

Volume :

21

Issue :

1

Database :

Complementary Index

Journal :

Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures

Publication Type :

Academic Journal

Accession number :

74345890

Full Text :

https://doi.org/10.1116/1.1540984