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Coating protecting layers in alternating current-plasma display panels.

Authors :
Lee, W. T.
Im, S. J.
Lee, D. Y.
Yu, SeGi
Kim, J. M.
Han, J. G.
Lee, J. W.
Choi, E. H.
Source :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 3, p1092-1098, 7p
Publication Year :
2003

Details

Language :
English
ISSN :
10711023
Volume :
21
Issue :
3
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
Publication Type :
Academic Journal
Accession number :
74346046
Full Text :
https://doi.org/10.1116/1.1576400