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Coating protecting layers in alternating current-plasma display panels.
- Source :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2003, Vol. 21 Issue 3, p1092-1098, 7p
- Publication Year :
- 2003
Details
- Language :
- English
- ISSN :
- 10711023
- Volume :
- 21
- Issue :
- 3
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures
- Publication Type :
- Academic Journal
- Accession number :
- 74346046
- Full Text :
- https://doi.org/10.1116/1.1576400