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Deposition of thin films of PZT by a focused ion beam sputtering technique.

Authors :
Castellano, R. N.
Source :
Ferroelectrics; Jan1980, Vol. 28 Issue 1, p387-390, 4p
Publication Year :
1980

Details

Language :
English
ISSN :
00150193
Volume :
28
Issue :
1
Database :
Complementary Index
Journal :
Ferroelectrics
Publication Type :
Academic Journal
Accession number :
75849308
Full Text :
https://doi.org/10.1080/00150198008227115