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Cavity perturbation measurement of plasma density in complex geometry rf discharges.
- Source :
- Journal of Applied Physics; 8/15/1989, Vol. 66 Issue 4, p1618, 4p, 2 Diagrams, 4 Graphs
- Publication Year :
- 1989
-
Abstract
- Investigates the plasma density in a complex geometry relative flow discharge chamber using a noninvasive microwave diagnostic. Overview of the spatial density profile; Electric field profiles of the modes; Measurement of the radial variations of the electric field.
- Subjects :
- PLASMA density
MICROWAVES
ELECTRIC fields
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 66
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7626535
- Full Text :
- https://doi.org/10.1063/1.344375