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Electron-beam probe measurements of electric fields in rf discharges.

Authors :
Sato, A. H.
Lieberman, M. A.
Source :
Journal of Applied Physics; 12/15/1990, Vol. 68 Issue 12, p6117, 8p
Publication Year :
1990

Abstract

Presents a study that applied an electron-beam probe to make time- and space-resolved measurements of the electric field in a parallel plate radio frequency discharge. Positions of the electron gun, deflection plates, discharge chamber and scintillating plastic; Electric field as a function of time at various positions in a plasma; Capacitive probe measurement of oscillations in the plasma potential.

Details

Language :
English
ISSN :
00218979
Volume :
68
Issue :
12
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7627955
Full Text :
https://doi.org/10.1063/1.346899