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Electron-beam probe measurements of electric fields in rf discharges.
- Source :
- Journal of Applied Physics; 12/15/1990, Vol. 68 Issue 12, p6117, 8p
- Publication Year :
- 1990
-
Abstract
- Presents a study that applied an electron-beam probe to make time- and space-resolved measurements of the electric field in a parallel plate radio frequency discharge. Positions of the electron gun, deflection plates, discharge chamber and scintillating plastic; Electric field as a function of time at various positions in a plasma; Capacitive probe measurement of oscillations in the plasma potential.
- Subjects :
- ELECTRON beams
ELECTRIC fields
RADIO frequency discharges
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 68
- Issue :
- 12
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7627955
- Full Text :
- https://doi.org/10.1063/1.346899