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Pulsed laser deposition of diamondlike hydrogenated amorphous carbon films.

Authors :
Malshe, A. P.
Kanetkar, S. M.
Ogale, S. B.
Kshirsagar, S. T.
Source :
Journal of Applied Physics; 12/1/1990, Vol. 68 Issue 11, p5648, 5p, 3 Graphs
Publication Year :
1990

Abstract

Deals with pulsed laser deposition of diamondlike hydrogenated amorphous carbon films. Evidence for the incorporation of hydrogen in the film; Characteristics of diamondlike hydrogenated amorphous carbon films; Explanation for the increased proportion of tetrahedral character in the amorphous carbon.

Subjects

Subjects :
AMORPHOUS substances
THIN films
PULSED laser deposition

Details

Language :
English
ISSN :
00218979
Volume :
68
Issue :
11
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7644208
Full Text :
https://doi.org/10.1063/1.346978
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