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Scanning tunneling microscopy as a tool to study surface roughness of sputtered thin films.

Authors :
Schönenberger, C.
Alvarado, S. F.
Ortiz, C.
Source :
Journal of Applied Physics; 11/1/1989, Vol. 66 Issue 9, p4258, 4p
Publication Year :
1989

Abstract

Studies the three-dimensional image of the surface roughness of sputtered iron-oxide thin films obtained using a scanning tunneling microscope. Limitations of the electron microscopy for surface three-dimensional studies; Details on the experiment; Discussion on the results of the study.

Details

Language :
English
ISSN :
00218979
Volume :
66
Issue :
9
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7655043