Real time spectroellipsometry for optimization of diamond film growth by microwave plasma-enhanced chemical vapor deposition from CO/H2 mixtures.

Investigates the growth rate and optical properties of thin nanocrystalline diamond films prepared over a range of the carbon monoxide(CO)/H[sub2] ratio, using real time spectroellipsometry (RTSE). Comparison between diamond growth and properties from CO/H[sub2] and CH[sub4]/H[sub2]/O[sub2] at similar phase-diagram points; Advantage of RTSE over Raman spectroscopy for characterizing and optimizing nanocrystalline diamond film; Significance of methyl radical for diamond film growth.