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Real time spectroellipsometry for optimization of diamond film growth by microwave plasma-enhanced chemical vapor deposition from CO/H2 mixtures.
- Source :
- Journal of Applied Physics; 12/1/1996, Vol. 80 Issue 11, p6489, 7p, 6 Graphs
- Publication Year :
- 1996
-
Abstract
- Investigates the growth rate and optical properties of thin nanocrystalline diamond films prepared over a range of the carbon monoxide(CO)/H[sub2] ratio, using real time spectroellipsometry (RTSE). Comparison between diamond growth and properties from CO/H[sub2] and CH[sub4]/H[sub2]/O[sub2] at similar phase-diagram points; Advantage of RTSE over Raman spectroscopy for characterizing and optimizing nanocrystalline diamond film; Significance of methyl radical for diamond film growth.
- Subjects :
- CRYSTAL growth
CARBON monoxide
SPECTRUM analysis
RAMAN spectroscopy
THIN films
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 80
- Issue :
- 11
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7658809
- Full Text :
- https://doi.org/10.1063/1.363668