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Growth and thermal decomposition of ultrathin ion-beam deposited C:H films.

Authors :
Schenk, A.
Winter, B.
Biener, J.
Lutterloh, C.
Schubert, U. A.
Küppers, J.
Source :
Journal of Applied Physics; 3/15/1995, Vol. 77 Issue 6, p2462, 12p, 2 Charts, 12 Graphs
Publication Year :
1995

Abstract

Presents information on a study which investigated the growth and thermal decomposition of ultrathin ion-beam deposited hydrogenated carbon films. Characteristics of film deposition; Experimental details; Results and discussion; Conclusions.

Subjects

Subjects :
ION bombardment
CARBON
THIN films

Details

Language :
English
ISSN :
00218979
Volume :
77
Issue :
6
Database :
Complementary Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7662809
Full Text :
https://doi.org/10.1063/1.358774
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