Back to Search
Start Over
Preparation of diamondlike carbon films by electron cyclotron resonance chemical vapor deposition.
- Source :
- Journal of Applied Physics; 3/15/1990, Vol. 67 Issue 6, p2890, 4p, 1 Diagram, 1 Chart, 6 Graphs
- Publication Year :
- 1990
-
Abstract
- Describes the preparation of diamondlike carbon (DLC) films through electron cyclotron resonance chemical vapor deposition. Properties of DLC; Composition of films deposited at low cavity bias voltage.
- Subjects :
- THIN films
ELECTRON cyclotron resonance sources
CHEMICAL vapor deposition
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 67
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7669643
- Full Text :
- https://doi.org/10.1063/1.345428