High aspect ratio nano fluidic channels by laser controlled fracturing.

Authors :: Hui, A.P.
Shui-jie Qin
Li, W.J.
Wang, M.Y.
Source :: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266); 2002, p156-159, 4p
Publication Year :: 2002

Language :: English
ISBNs :: 9780780371859
Database :: Complementary Index
Journal :: Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
Publication Type :: Conference
Accession number :: 79878333
Full Text :: https://doi.org/10.1109/MEMSYS.2002.984228