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Single-chip condenser miniature microphone with a high sensitive circular corrugated diaphragm.
- Source :
- Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266); 2002, p284-287, 4p
- Publication Year :
- 2002
Details
- Language :
- English
- ISBNs :
- 9780780371859
- Database :
- Complementary Index
- Journal :
- Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
- Publication Type :
- Conference
- Accession number :
- 79878363
- Full Text :
- https://doi.org/10.1109/MEMSYS.2002.984258