Investigation of Thermal Stability of High-kappa Interpoly Dielectrics in TaN Metal Floating Gate Memory Structures.

Details

Language :

English

ISBNs :

9781457702259

Database :

Complementary Index

Journal :

2011 3rd IEEE International Memory Workshop (IMW)

Publication Type :

Conference

Accession number :

80334261

Full Text :

https://doi.org/10.1109/IMW.2011.5873183