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Novel Bi-Layer Poly-Silicon Channel Vertical Flash Cell for Ultrahigh Density 3D SONOS NAND Technology.

Authors :
Kar, G.S.
Van den bosch, G.
Cacciato, A.
Blomme, P.
Arreghini, A.
Breuil, L.
De Keersgieter, A.
Paraschiv, V.
Vrancken, C.
Douhard, B.
Richard, O.
Debusschere, I.
Van Houdt, J.
Van Aerde, S.
Baojung Tang
Source :
2011 3rd IEEE International Memory Workshop (IMW); 2011, p1-4, 4p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781457702259
Database :
Complementary Index
Journal :
2011 3rd IEEE International Memory Workshop (IMW)
Publication Type :
Conference
Accession number :
80334287
Full Text :
https://doi.org/10.1109/IMW.2011.5873209
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