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A high-performance, temperature-stable, continuously tuned MEMS capacitor.
- Source :
- 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS); 2011, p752-755, 4p
- Publication Year :
- 2011
Details
- Language :
- English
- ISBNs :
- 9781424496327
- Database :
- Complementary Index
- Journal :
- 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publication Type :
- Conference
- Accession number :
- 80334720
- Full Text :
- https://doi.org/10.1109/MEMSYS.2011.5734534