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Modeling and investigation on the performance of a novel MEMS inertial sensor with the actuators drived by Lorentz force.

Authors :
Dong Linxi
Wang Wei
Li Shouluo
Liu Baoqing
Yan Haixia
Source :
Microwave Conference Proceedings (CJMW), 2011 China-Japan Joint; 2011, p1-4, 4p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781457706257
Database :
Complementary Index
Journal :
Microwave Conference Proceedings (CJMW), 2011 China-Japan Joint
Publication Type :
Conference
Accession number :
80336467

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