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Modeling and investigation on the performance of a novel MEMS inertial sensor with the actuators drived by Lorentz force.
- Source :
- Microwave Conference Proceedings (CJMW), 2011 China-Japan Joint; 2011, p1-4, 4p
- Publication Year :
- 2011
Details
- Language :
- English
- ISBNs :
- 9781457706257
- Database :
- Complementary Index
- Journal :
- Microwave Conference Proceedings (CJMW), 2011 China-Japan Joint
- Publication Type :
- Conference
- Accession number :
- 80336467