Fabrication and testing of a novel silicon probe for micromachined surface profilers.

Details

Language :

English

ISBNs :

9781612847757

Database :

Complementary Index

Journal :

2011 IEEE International Conference on Nano/Micro Engineered & Molecular Systems (NEMS)

Publication Type :

Conference

Accession number :

80342633

Full Text :

https://doi.org/10.1109/NEMS.2011.6017378