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Electrical monitoring of gate and active area mask misalignment error.

Authors :
Bansal, A.
Singhee, A.
Acar, E.
Costrini, G.
Source :
2011 Symposium on VLSI Circuits (VLSIC); 2011, p220-221, 2p
Publication Year :
2011

Details

Language :
English
ISBNs :
9781612841755
Database :
Complementary Index
Journal :
2011 Symposium on VLSI Circuits (VLSIC)
Publication Type :
Conference
Accession number :
80367511

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