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Innovative frequency output pressure sensor with single SOI NMOSFET suspended transducer.
- Source :
- 2011 IEEE International SOI Conference (SOI); 2011, p1-2, 2p
- Publication Year :
- 2011
Details
- Language :
- English
- ISBNs :
- 9781612847610
- Database :
- Complementary Index
- Journal :
- 2011 IEEE International SOI Conference (SOI)
- Publication Type :
- Conference
- Accession number :
- 80397681
- Full Text :
- https://doi.org/10.1109/SOI.2011.6081790