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Variability analysis of scaled poly-Si channel FinFETs and tri-gate flash memories for high density and low cost stacked 3D-memory application.
- Source :
- 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC); 2011, p203-206, 4p
- Publication Year :
- 2011
Details
- Language :
- English
- ISBNs :
- 9781457707070
- Database :
- Complementary Index
- Journal :
- 2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)
- Publication Type :
- Conference
- Accession number :
- 80398227
- Full Text :
- https://doi.org/10.1109/ESSDERC.2011.6044199