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Calculation of ion range profiles in a double layer substrate
- Source :
- Radiation Effects; 1982, Vol. 63 Issue 1-4, p55, 0p
- Publication Year :
- 1982
- Subjects :
- ION implantation
Subjects
Details
- Language :
- English
- ISSN :
- 00337579
- Volume :
- 63
- Issue :
- 1-4
- Database :
- Complementary Index
- Journal :
- Radiation Effects
- Publication Type :
- Periodical
- Accession number :
- 8068489
- Full Text :
- https://doi.org/10.1080/00337578208222825