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Improved performance of mn-thin gate insulating layer formed by ex-situ dry oxi-nitridation process upon GaAs : GaAs-MISFET.

Authors :
Takebe, M.
Paul, N.C.
Nakamura, K.
Tametou, M.
Iiyama, K.
Takamiya, S.
Source :
2003 International Symposium on Compound Semiconductors; 2003, p225-226, 2p
Publication Year :
2003

Details

Language :
English
ISBNs :
9780780378209
Database :
Complementary Index
Journal :
2003 International Symposium on Compound Semiconductors
Publication Type :
Conference
Accession number :
80775627
Full Text :
https://doi.org/10.1109/ISCS.2003.1239987