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FUSI Specific Yield Monitoring Enabling Improved Circuit Performance and Fast Feedback to Production.

Authors :
Chiarella, T.
Rosmeulen, M.
Tigelaar, H.
Kerner, C.
Nackaerts, A.
Ramos, J.
Lauwers, A.
Veloso, A.
Jurczak, M.
Rothschild, A.
Witters, L.
Yu, H.
Kittl, J.A.
Verbeeck, R.
de Potter, M.
Debusschere, I.
Absil, P.
Biesemans, S.
Hoffmann, T.
Source :
2007 IEEE International Conference on Microelectronic Test Structures; 2007, p33-36, 4p
Publication Year :
2007

Details

Language :
English
ISBNs :
9781424407811
Database :
Complementary Index
Journal :
2007 IEEE International Conference on Microelectronic Test Structures
Publication Type :
Conference
Accession number :
80905871
Full Text :
https://doi.org/10.1109/ICMTS.2007.374450
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