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Self-aligned Block Oxide Process for bSPIFETs.
- Source :
- 2007 International Symposium on Integrated Circuits; 2007, p248-251, 4p
- Publication Year :
- 2007
Details
- Language :
- English
- ISBNs :
- 9781424407972
- Database :
- Complementary Index
- Journal :
- 2007 International Symposium on Integrated Circuits
- Publication Type :
- Conference
- Accession number :
- 80941306
- Full Text :
- https://doi.org/10.1109/ISICIR.2007.4441844