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Bonding interfaces in wafer-level metal/adhesive bonded 3D integration.

Authors :
McMahon, J.J.
Chan, E.
Lee, S.H.
Gutmann, R.J.
Lu, J.-Q.
Source :
2008 58th Electronic Components & Technology Conference; 2008, p871-878, 8p
Publication Year :
2008

Details

Language :
English
ISBNs :
9781424422302
Database :
Complementary Index
Journal :
2008 58th Electronic Components & Technology Conference
Publication Type :
Conference
Accession number :
80980883
Full Text :
https://doi.org/10.1109/ECTC.2008.4550079