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Wafer level characterization and failure analysis of microsensors and actuators.

Authors :
De Wolf, I.
De Coster, J.
Valera Pedreira, O.
Haspeslagh, L.
Witvrouw, A.
Source :
2008 IEEE Sensors; 2008, p144-147, 4p
Publication Year :
2008

Details

Language :
English
ISBNs :
9781424425808
Database :
Complementary Index
Journal :
2008 IEEE Sensors
Publication Type :
Conference
Accession number :
81033364
Full Text :
https://doi.org/10.1109/ICSENS.2008.4716404
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