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A CMOS MEMS thermal sensor with high frequency output.
- Source :
- 2008 IEEE Sensors; 2008, p387-390, 4p
- Publication Year :
- 2008
Details
- Language :
- English
- ISBNs :
- 9781424425808
- Database :
- Complementary Index
- Journal :
- 2008 IEEE Sensors
- Publication Type :
- Conference
- Accession number :
- 81033420
- Full Text :
- https://doi.org/10.1109/ICSENS.2008.4716460