Adjustable Refractive Index Method for Complex Microstructures by Automated Dynamic Mode Multidirectional UV Lithography.

Details

Language :

English

ISBNs :

9781424429776

Database :

Complementary Index

Journal :

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

Publication Type :

Conference

Accession number :

81074807

Full Text :

https://doi.org/10.1109/MEMSYS.2009.4805487