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Optimized integrated copper gap-fill approaches for 2x flash devices.
- Source :
- 2009 IEEE International Interconnect Technology Conference; 2009, p38-40, 3p
- Publication Year :
- 2009
Details
- Language :
- English
- ISBNs :
- 9781424444922
- Database :
- Complementary Index
- Journal :
- 2009 IEEE International Interconnect Technology Conference
- Publication Type :
- Conference
- Accession number :
- 81079918
- Full Text :
- https://doi.org/10.1109/IITC.2009.5090334