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Optimized integrated copper gap-fill approaches for 2x flash devices.

Authors :
Ma, P.
Qian Luo
Sundarrajan, A.
Jiang Lu
Aubuchon, J.
Tseng, J.
Kumar, N.
Okazaki, M.
Yuchun Wang
You Wang
Yufei Chen
Naik, M.
Emesh, I.
Narasimhan, M.
Source :
2009 IEEE International Interconnect Technology Conference; 2009, p38-40, 3p
Publication Year :
2009

Details

Language :
English
ISBNs :
9781424444922
Database :
Complementary Index
Journal :
2009 IEEE International Interconnect Technology Conference
Publication Type :
Conference
Accession number :
81079918
Full Text :
https://doi.org/10.1109/IITC.2009.5090334