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Factors affecting copper filling process within high aspect ratio deep vias for 3D chip stacking.

Authors :
Kim, B.
Sharbono, C.
Ritzdorf, T.
Schmauch, D.
Source :
56th Electronic Components & Technology Conference 2006; 2006, p6-6, 1p
Publication Year :
2006

Details

Language :
English
ISBNs :
9781424401529
Database :
Complementary Index
Journal :
56th Electronic Components & Technology Conference 2006
Publication Type :
Conference
Accession number :
81104024
Full Text :
https://doi.org/10.1109/ECTC.2006.1645755