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Factors affecting copper filling process within high aspect ratio deep vias for 3D chip stacking.
- Source :
- 56th Electronic Components & Technology Conference 2006; 2006, p6-6, 1p
- Publication Year :
- 2006
Details
- Language :
- English
- ISBNs :
- 9781424401529
- Database :
- Complementary Index
- Journal :
- 56th Electronic Components & Technology Conference 2006
- Publication Type :
- Conference
- Accession number :
- 81104024
- Full Text :
- https://doi.org/10.1109/ECTC.2006.1645755