A novel topology for pulse generators in magnetron sputter systems.

Authors :: Gueldner, H.
Wolf, H.
Eckholz, F.
Schrade, F.
Source :: 7th IEEE International Power Electronics Congress. Technical Proceedings CIEP 2000 (Cat. No.00TH8529); 2000, p365-370, 6p
Publication Year :: 2000

Language :: English
ISBNs :: 9780780364899
Database :: Complementary Index
Journal :: 7th IEEE International Power Electronics Congress. Technical Proceedings CIEP 2000 (Cat. No.00TH8529)
Publication Type :: Conference
Accession number :: 81107108
Full Text :: https://doi.org/10.1109/CIEP.2000.891441