AFM cantilever array for parallel lithography of quantum devices.

Authors :: Kakushima, K.
Watanabe, M.
Shimamoto, K.
Gouda, T.
Ataka, M.
Mimura, H.
Isono, Y.
Hashiguchi, G.
Mihara, Y.
Fujita, H.
Source :: 2003 International Microprocesses & Nanotechnology Conference Digest of Papers Microprocesses & Nanotechnology 2003; 2003, p336-337, 2p
Publication Year :: 2003

Language :: English
ISBNs :: 9784891140403
Database :: Complementary Index
Journal :: 2003 International Microprocesses & Nanotechnology Conference Digest of Papers Microprocesses & Nanotechnology 2003
Publication Type :: Conference
Accession number :: 81128277
Full Text :: https://doi.org/10.1109/IMNC.2003.1268783