UV-based nanoimprint lithography for photosensitive dry film.

Details

Language :

English

ISBNs :

9784990247225

Database :

Complementary Index

Journal :

2005 Digest of Papers Microprocesses & Nanotechnology

Publication Type :

Conference

Accession number :

81128392

Full Text :

https://doi.org/10.1109/IMNC.2005.203808