Back to Search Start Over

Local electrical properties of HfO2 thin films measured by conducting atomic force microscopy.

Authors :
Goto, T.
Sakashita, S.
Ikeda, H.
Sakashita, M.
Sakai, A.
Zaima, S.
Yasuda, Y.
Source :
Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537); 2001, p180-183, 4p
Publication Year :
2001

Details

Language :
English
ISBNs :
9784891140212
Database :
Complementary Index
Journal :
Extended Abstracts of International Workshop on Gate Insulator. IWGI 2001 (IEEE Cat. No.01EX537)
Publication Type :
Conference
Accession number :
81134979
Full Text :
https://doi.org/10.1109/IWGI.2001.967578