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Nanoscale Servo System of AFM using Surface Topography Learning with Perfect Tracking Control.
- Source :
- IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society; 2007, p2307-2312, 6p
- Publication Year :
- 2007
Details
- Language :
- English
- ISBNs :
- 9781424407835
- Database :
- Complementary Index
- Journal :
- IECON 2007 - 33rd Annual Conference of the IEEE Industrial Electronics Society
- Publication Type :
- Conference
- Accession number :
- 81146933
- Full Text :
- https://doi.org/10.1109/IECON.2007.4460276