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Molecular dynamics analysis for micro notch effects of single crystal silicon thin film.

Authors :
Fujii, T.
Akiniwa, Y.
Source :
IEEE International Symposium on Micro-NanoMechatronics & Human Science, 2005; 2005, p229-234, 6p
Publication Year :
2005

Details

Language :
English
ISBNs :
9780780394827
Database :
Complementary Index
Journal :
IEEE International Symposium on Micro-NanoMechatronics & Human Science, 2005
Publication Type :
Conference
Accession number :
81163939
Full Text :
https://doi.org/10.1109/MHS.2005.1589995