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Molecular dynamics analysis for micro notch effects of single crystal silicon thin film.
- Source :
- IEEE International Symposium on Micro-NanoMechatronics & Human Science, 2005; 2005, p229-234, 6p
- Publication Year :
- 2005
Details
- Language :
- English
- ISBNs :
- 9780780394827
- Database :
- Complementary Index
- Journal :
- IEEE International Symposium on Micro-NanoMechatronics & Human Science, 2005
- Publication Type :
- Conference
- Accession number :
- 81163939
- Full Text :
- https://doi.org/10.1109/MHS.2005.1589995