Analysis of elastic properties of textured thin films.

MLA

Akiniwa, Y., et al. “Analysis of Elastic Properties of Textured Thin Films.” Micro-Nanomechatronics & Human Science, 2004 & the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004, Jan. 2004, pp. 75–80. EBSCOhost, https://doi.org/10.1109/MHS.2004.1421280.

APA

Akiniwa, Y., Machiya, S., Serizawa, K., & Tanaka, K. (2004). Analysis of elastic properties of textured thin films. Micro-Nanomechatronics & Human Science, 2004 & the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004, 75–80. https://doi.org/10.1109/MHS.2004.1421280

Chicago

Akiniwa, Y., S. Machiya, K. Serizawa, and K. Tanaka. 2004. “Analysis of Elastic Properties of Textured Thin Films.” Micro-Nanomechatronics & Human Science, 2004 & the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004, January, 75–80. doi:10.1109/MHS.2004.1421280.