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PL and CL emissions in thermal oxide and silicon rich oxide films implanted with silicon.
- Source :
- Proceedings of the Fourth IEEE International Caracas Conference on Devices, Circuits & Systems (Cat. No.02TH8611); 2002, pD038-D036, 1p
- Publication Year :
- 2002
Details
- Language :
- English
- ISBNs :
- 9780780373808
- Database :
- Complementary Index
- Journal :
- Proceedings of the Fourth IEEE International Caracas Conference on Devices, Circuits & Systems (Cat. No.02TH8611)
- Publication Type :
- Conference
- Accession number :
- 81246539
- Full Text :
- https://doi.org/10.1109/ICCDCS.2002.1004061