Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays.

Authors :: Garverick, S.L.
Nagy, M.L.
Kane, M.J.
Jun Guo
Source :: Proceedings of the IEEE 2003 Custom Integrated Circuits Conference, 2003; 2003, p481-484, 4p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780378421
Database :: Complementary Index
Journal :: Proceedings of the IEEE 2003 Custom Integrated Circuits Conference, 2003
Publication Type :: Conference
Accession number :: 81248079
Full Text :: https://doi.org/10.1109/CICC.2003.1249445