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Accurate profiling of PN junction carrier concentration by scanning nonlinear dielectric microscopy (SNDM).

Authors :
Matsukawa, T.
Yasumuro, C.
Masahara, M.
Tanoue, H.
Kanemaru, S.
Source :
Fourth International Workshop on Junction Technology, 2004 (IWJT '04); 2004, p90-93, 4p
Publication Year :
2004

Details

Language :
English
ISBNs :
9780780381919
Database :
Complementary Index
Journal :
Fourth International Workshop on Junction Technology, 2004 (IWJT '04)
Publication Type :
Conference
Accession number :
81294180
Full Text :
https://doi.org/10.1109/IWJT.2004.1306766