Development of Scanning Probe Parallel Nanowriting System with Electron Beam Resist.

Details

Language :

English

ISBNs :

9781424408429

Database :

Complementary Index

Journal :

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators & Microsystems Conference

Publication Type :

Conference

Accession number :

81299016

Full Text :

https://doi.org/10.1109/SENSOR.2007.4300466