Smooth GaN recess wet photoelectrochemical etching.

Authors :: Gregusova, D.
Novak, J.
Hardtdegen, H.
Soltys, J.
Kostic, I.
Gregus, J.
Kordos, P.
Source :: Fifth International Conference on Advanced Semiconductor Devices & Microsystems, 2004. ASDAM 2004 (9780780383357); 2004, p199-202, 4p
Publication Year :: 2004

Language :: English
ISBNs :: 9780780383357
Database :: Complementary Index
Journal :: Fifth International Conference on Advanced Semiconductor Devices & Microsystems, 2004. ASDAM 2004 (9780780383357)
Publication Type :: Conference
Accession number :: 81304380
Full Text :: https://doi.org/10.1109/ASDAM.2004.1441194