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Failure rate estimation of each process layer using critical area analysis and failing bit results.

Authors :
Matsumoto, C.
Hamamura, Y.
Chida, T.
Tsunoda, Y.
Go, N.
Uozaki, H.
Miyazaki, I.
Kamohara, S.
Kaneko, Y.
Kanamitsu, K.
Source :
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI; 2010, p45-50, 6p
Publication Year :
2010

Details

Language :
English
ISBNs :
9781424465170
Database :
Complementary Index
Journal :
Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
Publication Type :
Conference
Accession number :
81319245
Full Text :
https://doi.org/10.1109/ASMC.2010.5551419
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