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Deffect profiling in the SiO2/ Al2O3 interface using Variable Tcharge-Tdischarge Amplitude Charge Pumping (VT2ACP).
- Source :
- 2009 IEEE International Reliability Physics Symposium; 2009, p21-25, 5p
- Publication Year :
- 2009
Details
- Language :
- English
- ISBNs :
- 9781424428885
- Database :
- Complementary Index
- Journal :
- 2009 IEEE International Reliability Physics Symposium
- Publication Type :
- Conference
- Accession number :
- 81322575
- Full Text :
- https://doi.org/10.1109/IRPS.2009.5173219