Force transmitting element fabrication and characterization for MEMS tri-axial force sensor application.

Details

Language :

English

ISBNs :

9781424485604

Database :

Complementary Index

Journal :

2010 12th Electronics Packaging Technology Conference (EPTC)

Publication Type :

Conference

Accession number :

81373672

Full Text :

https://doi.org/10.1109/EPTC.2010.5702614