Using a combination of C-AFM and SCM for failure analysis of SRAM leakage in CMOS process with the addition of a DNW module.

Details

Language :

English

ISBNs :

9781424439119

Database :

Complementary Index

Journal :

2009 16th IEEE International Symposium on the Physical & Failure Analysis of Integrated Circuits

Publication Type :

Conference

Accession number :

81390441

Full Text :

https://doi.org/10.1109/IPFA.2009.5232704