Fabrication and performance of Microplasma Reactor for maskless scanning plasma etching.

Details

Language :

English

ISBNs :

9781424465439

Database :

Complementary Index

Journal :

2010 5th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (NEMS)

Publication Type :

Conference

Accession number :

81463667

Full Text :

https://doi.org/10.1109/NEMS.2010.5592188